The energy of the beam should be enough to kick out (“recoil”) the atoms of the sample. The energy of the beam depends on the sample to be studied. The incident energetic ions can have a wide range of energy from 2 MeV to 200 MeV. It also provides information about the depth profile of the sample. Depending on the kinetics of the ions, cross section area, and the loss of energy of the ions in the matter, ERDA helps determine the quantification of the elemental analysis. Such interactions are commonly of Coulomb nature. In the technique of ERDA, an energetic ion beam is directed at a sample to be characterized and (as in Rutherford backscattering) there is an elastic nuclear interaction between the ions of beam and the atoms of the target sample. This technique is known by several different names. ( February 2018) ( Learn how and when to remove this template message)Įlastic recoil detection analysis ( ERDA), also referred to as forward recoil scattering (or, contextually, spectrometry), is an ion beam analysis technique in materials science to obtain elemental concentration depth profiles in thin films. Please help improve this article if you can. The specific problem is: Layout of mathematical formulas. This article may require cleanup to meet Wikipedia's quality standards.
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